Article

Catalytic Chain Length and Characteristic Curve in a Chemical Amplification Photoresist Using Sulfonate Photoacid Generator
Yang SK, Park CE, Ahn KD
Sulfonate광산발생제를 사용하는 화학증폭 포토레지스트의 Catalytic Chain Length 및 특성곡선
양승관, 박찬언, 안광덕

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Polymer(Korea) 폴리머
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ISSN 2234-8077(Online)
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